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MEMS and NEMS in Micro and Nanosystem Devices
Major: Micro- and Nanosystem Engineereng
Code of subject: 7.153.01.E.019
Credits: 7.00
Department: Semiconductor Electronics
Lecturer: Dr.Sci., Prof. Khoverko Yuriy
Semester: 2 семестр
Mode of study: денна
Завдання: The task during the study of the academic discipline involves the formation and development of students:
General competences, which consists in the formation of - basic knowledge of fundamental sciences, in the amount necessary for mastering the disciplines; basic knowledge in the field of micro- and nanosystem technology; the ability to solve tasks and make appropriate decisions; ability to analyze and synthesize; ability to apply knowledge in practice; the ability to search and analyze information from various sources; research skills; the ability to work both individually and in a team.
Professional competencies, which consists in the formation of basic knowledge of the main regulatory and legal acts and reference materials, current standards and technical conditions, instructions and other regulatory documents in the field of "Automation and Instrumentation"; the ability to use knowledge and skills for research, selection, implementation, repair, and design of devices and devices of micro- and nanosystem technology and their components; the ability to develop methods of assessing the quality of materials of micro- and nanosystem technology, methods of testing devices and devices, metrological verification systems; the ability to argue the choice of methods for solving specialized problems, critically evaluate the obtained results and defend the decisions made.
Learning outcomes: The learning outcomes of this discipline include the following learning outcomes:
1. Ability to demonstrate knowledge and understanding of basic physical processes and phenomena in semiconductors, dielectrics, as well as magnetic and optical materials for micro- and nanosystem technology devices;
2. The ability to use in practice the acquired knowledge regarding the manufacturing technology of micro- and nanoelectromechanical systems;
3. The ability to analyze the physical and chemical processes that occur during the manufacture of micro- and nanoelectromechanical systems;
4. Choose the material for manufacturing and justify the physical structure;
5. To improve manufacturing processes and modify them depending on the requirements for the finished structure;
6. Evaluate the obtained results and defend with arguments the decisions made regarding the manufacture of devices of micro- and nanosystem technology
Required prior and related subjects: Previous academic disciplines:
Fundamentals of micro- and nanotechnologies
Modeling of electronic components and devices
Technological foundations of micro- and nanosystem technology
Associated and following academic disciplines:
Devices based on MOS
Nanostructures
Management of the structure and properties of semiconductor materials and devices
Summary of the subject: The discipline contains data on the physical and technological foundations of the creation of basic types and structures of micro- and nanoelectromechanical systems, regulations and recommendations on the main technological processes of their manufacture and the main methods of control in the production process of micro- and nanoelectromechanical systems.
Опис: The discipline covers the following components:
Nanomaterials and nanotechnologies. Current state. Technology of creation of micro- and nanostructures. Production technology of polycrystalline silicon. Application in microelectromechanical systems as film elements.
Instruments and devices of micro- and nanosystem technology: creation, characteristics, parameters. Intelligent multisensor microsystems
Assessment methods and criteria: Assessment, control work, oral defense of the written component
Критерії оцінювання результатів навчання: Practical lessons - 80
Written component -70
Oral component -10
Recommended books: Educational and methodological support:
Khoverko Y.M. MEMS and NEMS in devices of micro- and nanosystem technology. – electronic educational and methodical complex – registration number No. Е41-124-126/2022. – hosting address: https://vns.lpnu.ua/course/view.php?id =7670
Khoverko Y.M. Methodical instructions for practical works/individual works (location address: https://vns.lpnu.ua/course/view.php?id=7670).
Recommended Books.
P.I. Broday, J. Murray, Physical Foundations of Microtechnology, 1986.
U. Till, J. Lacson, Integral schemes: materials, devices, manufacturing, 1985.
Druzhynin A.O., Kogut I.T., Khoverko Yu.M. Silicon-on-insulator structures for sensor electronics: Monograph. - Lviv: Ed. Lviv Polytechnic University. - 2013. - 233 p.
Filamentous crystals of silicon and silicon-germanium solid solution in micro- and nanoelectronics: [monograph] / A.O. Druzhinin, I.P. Ostrovsky, Yu.M. Khoverko, S.I. Nichkalo. – Lviv: Publishing House "Triada Plus", 2016. – 264 p.
Khoverko Yu.M., Druzhynin A.O., Ostrovsky I.P. Technology of elements of integrated circuits of micro and nanosystem technology. Education manual. - Lviv: Publishing House of the National University "Lviv Polytechnic", 2017. – 172 s .
Scientific periodical literature