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Microsystem Technologies
Major: Metrology and Information-measuring Technology
Code of subject: 6.175.03.E.096
Credits: 5.00
Department: Department of Intelligent Mechatronics and Robotics
Lecturer: O.Ivakhiv
Semester: 7 семестр
Mode of study: денна
Завдання: Based on the results of studying the discipline, a specialist should know:
• prerequisites for the appearance of micro- and nanosystem equipment;
• features of detecting physical regularities in micro- and nanoscale objects:
• physical principles of operation of microsystem equipment, features of their application.
A trained specialist should be able to (list of competencies):
• to think creatively and systematically (CSR-4);
• study and self-study (CSO-2);
• correctly criticize and evaluate oneself self-critically (KSO-3);
• use mathematical methods, physical and chemical effects, the theory of electric and magnetic circuits, theoretical mechanics in the chosen profession (ZK-5, ZK-7, ZK-11);
• work with a computer and knowledge bases in the field of informatics and modern information technologies (ZK-6, ZK-14);
• apply knowledge of the basics of materials science and information technologies to automated development, production of technological documentation and practice of instrument manufacturing (SK-10);
• synthesize structural, functional and principle schemes of mechatronic devices based on micro system technology (SK-12, SK-13);
• practically use software tools for designing and researching microsystem devices to solve specific applied problems (SK-14);
• model the principles of operation of basic microsystem tools, investigate their main technical characteristics by means of simulation modeling (SK-18);
• collect and analyze scientific and technical information on the subject of research (SK-19, SK-20).
Learning outcomes: By the end of the study, learners are expected to be able to:
• know a preconditions of the micro- and nanosystems appearance;
• know a specific physical properties manifestations of micro- and nano-objects;
• know a physical principals of micro - and nanosystems operation, the main features of its application;
• make arrangements of the practical software use for micro - and nanosystems design and investigation corresponded with proper application task.
Required prior and related subjects: Prerequisites:
• Phisics,
• Metrology and Instrumentation Fundamentals,
• Methods and Devices of Electrical Values Measurement,
• Mechatronics Fundamentals
• Mechatronic Devices Technology (Processing?)
Corequisites: Ukrainian language for professional purposes.
• Fundamentals of Mechatronic Systems Control,
• Fundamentals of Actuating Mechanisms for Mechatronic Devices Design
Summary of the subject: General structure of integrated sensor networks platform. Overview of integrated microsystems devices. Technology aspects of micro - and nanosystems manufacturing. Micro - and nanosystems physical effects basement. Integrated actuating mechanisms. Microsensors. Micropumps. Labs on chip. On the single chip ADC, microprocessor operation and transmission functions combination.
Опис: No. Title of the topic Number of hours
7th semester
1. General structure of integrated platforms of sensor networks 2
2. Overview of integrated means of microsystem technology 2
3. Technological aspects of microsystem technologies 4
4. Basic physical effects of microsystem technology 8
5. Executive mechanisms of integral execution 8
6. Sensors 8
7. Micropumps
8. Laboratories on a crystal (SoC) 6
9. Combination of analog-to-digital conversion, microprocessor processing and transmission on one crystal 4
Assessment methods and criteria: • written report, oral polling (examination) (30%).
• final control (control event, exam), oral-writing form (70%).
Критерії оцінювання результатів навчання: Maximum score in points
Current control (PC) 40 points
Examination control (written part) 50 points
Examination control (oral part) 10 points
Total for the discipline 100 points
Порядок та критерії виставляння балів та оцінок: 100-88 points - certified with an “excellent” grade - High level: the student demonstrates an in-depth mastery of the conceptual and categorical apparatus of the discipline, systematic knowledge, skills and abilities of their practical application. The mastered knowledge, skills and abilities provide the ability to independently formulate goals and organize learning activities, search and find solutions in non-standard, atypical educational and professional situations. The applicant demonstrates the ability to make generalizations based on critical analysis of factual material, ideas, theories and concepts, to formulate conclusions based on them. His/her activity is based on interest and motivation for self-development, continuous professional development, independent research activities, implemented with the support and guidance of the teacher. 87-71 points - certified with a grade of “good” - Sufficient level: involves mastery of the conceptual and categorical apparatus of the discipline at an advanced level, conscious use of knowledge, skills and abilities to reveal the essence of the issue. Possession of a partially structured set of knowledge provides the ability to apply it in familiar educational and professional situations. Aware of the specifics of tasks and learning situations, the student demonstrates the ability to search for and choose their solution according to the given sample, to argue for the use of a particular method of solving the problem. Their activities are based on interest and motivation for self-development and continuous professional development. 70-50 points - certified with a grade of “satisfactory” - Satisfactory level: outlines the mastery of the conceptual and categorical apparatus of the discipline at the average level, partial awareness of educational and professional tasks, problems and situations, knowledge of ways to solve typical problems and tasks. The applicant demonstrates an average level of skills and abilities to apply knowledge in practice, and solving problems requires assistance, support from a model. The basis of learning activities is situational and heuristic, dominated by motives of duty, unconscious use of opportunities for self-development. 49-00 points - certified with a grade of “unsatisfactory” - Unsatisfactory level: indicates an elementary mastery of the conceptual and categorical apparatus of the discipline, a general understanding of the content of the educational material, partial use of knowledge, skills and abilities. The basis of learning activities is situational and pragmatic interest.
Recommended books: 1. Є.С. Поліщук, М.М.Дорожовець, Б.І.Стадник, О.В.Івахів, Т.Г.Бойко, А.Ковальчик: Засоби та методи вимірювань неелектричних величин. Підручник /За ред. проф. Є.С.Поліщука – Львів: Видавництво «Бескид Біт», 2008, - 618 с, табл. 64.
2. М.Д.Гераїмчук, О.В.Івахів, М.І.Паламар, Б.М.Шевчук. Основи побудови перспективних бездротових сенсорних мереж. Монографія – Київ: ЕКМО, 2010, 124 с.
3. Ванько В.М., Поліщук Є.С., Дорожовець М.М., Яцук В.О., Яцук Ю.В. Вимірювальні перетворювачі (сенсори) – Львів: Видавництво «Львівська політехніка», 2015. – 580 с.
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