Technological Bases of Micro- and Nanosystem Technique

Major: Micro and Nanosystem Technology
Code of subject: 6.153.03.O.25
Credits: 4.00
Department: Semiconductor Electronics
Lecturer: Ph.D. Guba S.K.
Semester: 4 семестр
Mode of study: денна
Learning outcomes: is the acquisition of skills and abilities covering: - theoretical foundations of methods and technological schemes for growing semiconductor materials; - the main technological processes and methods of calculating the main technological parameters; - methods of calculating technological process parameters; - methods of calculating the parameters of monocrystalline crystals; - to acquire skills in designing the element base of microcircuits.
Required prior and related subjects: Prerequisites: Physics Modeling of electronic components and devices Necessities: Fundamentals of micro- and nanotechnologies Nanostructures Management of the structure and properties of semiconductor materials and devices, part 2
Summary of the subject: The educational discipline "Technological foundations of micro- and nanosystem engineering" is designed for students of the Institute of Telecommunications, Radio Electronics and Electronic Engineering, who are studying in specialty 176 "Micro- and nanosystem engineering of the Internet of Things" in the field of "Electronics". The course consists of 30 lecture hours, 15 hours of practical work, and 30 hours of laboratory work in the IV semester. The lecture course covers seven chapters, in which the physical foundations and technological methods of growing and cleaning semiconductor materials are outlined, which is the basis for the further production of integrated circuits in the volume or on the surface of crystal substrates. The main directions of development of modern promising nanotechnologies for obtaining model objects of single crystals are considered
Assessment methods and criteria: Current control (30 %) credit control (70 %)
Recommended books: Kurylo I.V., Guba S.K. Basics of technology of semiconductor materials. Study guide// Lviv: Publishing House of the National University "Lviv Polytechnic". - 2012. - 240 p. Hoverko Yu.M. Technological foundations of micro- and nanosystem engineering electronic educational and methodological complex for students of specialty 176 "Micro- and nanosystem engineering". – https://vns.lpnu.ua/course/view.php?id=4265