Fundamentals of Micro- and Nanotechnology

Major: Micro and Nanosystem Technology
Code of subject: 6.153.01.E.076
Credits: 6.00
Department: Semiconductor Electronics
Lecturer: PhD, assistant Natalia S. Liakh-Kaguy
Semester: 5 семестр
Mode of study: денна
Learning outcomes: As a result of the discipline learning the student has to know: • modern technological growing methods of thin and quantum-dimensional films, quantum wires and dots of semiconductors, dielectrics and metals; • history of their development, physical and chemical bases of their operation, advantages and disadvantages; • the possibility of mass production of structures and devices in modern micro- and nanoelectronics. Specialist should be able to: • effective use of their knowledge in growing technology of thin quantum-dimensional films, quantum wires and dots for different application materials; • consciously choose optimal technological methods of creation micro- and nanostructures; • predict the results of technological process of their growing.
Required prior and related subjects: prerequisites: • Physics • Technological bases of electronics
Summary of the subject: Technological methods for growing of thin films and quantum-dimensional layers. Principles of thin-film technologies. Vacuum deposition of thin films. The processes of evaporation and condensation in the technology of thin film deposition from the gas phase. Epitaxy of thin films from the gas phase. Molecular beam epitaxy. Gas-phase epitaxy from organometallic compounds and hydrides. Liquid phase epitaxy. Technological methods of producing quantum wires. Technological methods of producing quantum dots. The processes of self-organization and their using to create an ensemble of quantum dots. The probe nanotechnology. The latest developments in the field of micro- and nanotechnology.
Assessment methods and criteria: • Current checkups: checkups on the laboratory classes, tests and individual tasks (40%) • Final test – Exam: written answers and oral examination (60%)
Recommended books: 1. Zayachuk D.M. Nanotechnologies and nanostructures: Textbook – Lviv: Lviv Polytechnic National University, 2009. - 580 p. (in Ukrainian) 2. Tairov Y.M., Tsvetkov V.F. The technology of semiconductor and dielectric materials. – Moscow: High School, 1990. (in Russian). 3. Cheng L., Plog K. Molecular beam epitaxy and heterostructures. – Moscow: Mir, 1989. - 600 p. (in Russian). 4. Ufimtsev V.B., Akchurin A.D. Physical and chemical bases of liquid phase epitaxy. – Moscow.: Metallurgy, 1983, 224 p. (in Russian).