Fundamentals of Micro- and Nanotechnology

Major: Telecommunications and Radio Engineering
Code of subject: 6.172.05.E.121
Credits: 5.00
Department: Electronics and Information Technology
Lecturer: Professor Dmytro Zayachuk
Semester: 8 семестр
Mode of study: денна
Мета вивчення дисципліни: The purpose of studying the discipline is to prepare future specialists for practical work in the field of radio electronic equipment production based on modern semiconductor micro- and nanostructure manufacturing technologies, to form students' scientific and practical skills in the technology of thin and quantum-sized films, quantum threads and quantum dots, and modification their physical properties.
Завдання: The study of an academic discipline involves the formation and development of students' competencies: General: Creativity, ability to system thinking; Ability to solve tasks and make appropriate informed decisions; Ability to adapt and work in new situations. Specialists: Basic knowledge in the field of modern semiconductor micro- and nanotechnologies, necessary for effective professional activity; Ability to apply professional knowledge in the process of solving professional problems; Knowledge and understanding of the subject area of the specialty; Ability to self-development, improvement of qualifications, skills and mastery.
Learning outcomes: 1. Knowledge and understanding of scientific principles and laws on which modern micro- and nanotechnologies of manufacturing structures, devices, devices and systems of telecommunications and radio engineering are based. 2. The ability to use in practice the acquired knowledge of the technology of forming two-dimensional, one-dimensional, zero-dimensional semiconductor structures to meet the needs of modern radio electronics and information systems. 3. The ability to use scientific literature, which is devoted to the problems of the educational discipline. 4. The ability to independently analyze the results of the latest developments and achievements in the field of nanostructure manufacturing technology. 5. The ability to independently draw conclusions.
Required prior and related subjects: Previous academic disciplines Physics, Higher Mathematics Associated and subsequent academic disciplines Structural design of radio electronic devices Basics of materials science
Summary of the subject: The basics of modern technologies for growing device structures of semiconductor micro- and nanoelectronics are explained: vacuum deposition of thin films; epitaxy of thin films from the gas phase; molecular beam epitaxy; gas-phase epitaxy from organometallic compounds and hydrides; liquid phase epitaxy; technological methods of forming arrays of quantum threads and quantum dots. The latest developments and achievements in the field of micro- and nanotechnologies are analyzed.
Опис: Introduction to the course Evaporation processes in the technology of growing thin films and quantum-sized layers from the gas phase Condensation processes in the technology of growing thin films and quantum-sized layers from the gas phase Germs of a new phase and their role in the technology of growing thin films Epitaxy as the basis of technology for obtaining monocrystalline thin films Implementation of the principles of epitaxy in modern nanotechnologies Liquid phase epitaxy Technological methods of forming arrays of quantum threads and quantum dots
Assessment methods and criteria: Presentations at practical classes, test control works in the National Emergency Service, examination control.
Критерії оцінювання результатів навчання: The level of assimilation of educational material. The level of understanding of the educational material. Current results in practical classes.
Порядок та критерії виставляння балів та оцінок: 100–88 points – (“excellent”) is awarded for a high level of knowledge (some inaccuracies are allowed) of the educational material of the component contained in the main and additional recommended literary sources, the ability to analyze the phenomena being studied in their interrelationship and development, clearly, succinctly, logically, consistently answer the questions, the ability to apply theoretical provisions when solving practical problems; 87–71 points – (“good”) is awarded for a generally correct understanding of the educational material of the component, including calculations, reasoned answers to the questions posed, which, however, contain certain (insignificant) shortcomings, for the ability to apply theoretical provisions when solving practical tasks; 70 – 50 points – (“satisfactory”) awarded for weak knowledge of the component’s educational material, inaccurate or poorly reasoned answers, with a violation of the sequence of presentation, for weak application of theoretical provisions when solving practical problems; 49-26 points - ("not certified" with the possibility of retaking the semester control) is awarded for ignorance of a significant part of the educational material of the component, significant errors in answering questions, inability to apply theoretical provisions when solving practical problems; 25-00 points - ("unsatisfactory" with mandatory re-study) is awarded for ignorance of a significant part of the educational material of the component, significant errors in answering questions, inability to navigate when solving practical problems, ignorance of the main fundamental provisions.
Recommended books: 1. Заячук Д.М., Нанотехнології і наноструктури, Львів, 2009. 2. Технология тонких пленок. Под ред. Л. Майссела и Р. Глэнга. Т. 1 и 2., М.: Советское радио, 1977. 3. Молекулярно-лучевая эпитаксия и гетероструктуры. Под ред. Л. Ченга и К. Плога, М.: Мир, 1989. 4. Физико-химические основы жидкофазной эпитаксии. Уфимцев В.Б., Акчурин Р.Х. М.: Металлургия, 1983.
Уніфікований додаток: Lviv Polytechnic National University ensures the realization of the right of persons with disabilities to obtain higher education. Inclusive educational services are provided by the Service of accessibility to learning opportunities "Without restrictions", the purpose of which is to provide permanent individual support for the educational process of students with disabilities and chronic diseases. An important tool for the implementation of the inclusive educational policy at the University is the Program for improving the qualifications of scientific and pedagogical workers and educational and support staff in the field of social inclusion and inclusive education. Contact at: St. Karpinsky, 2/4, 1st floor, room 112 E-mail: nolimits@lpnu.ua Websites: https://lpnu.ua/nolimits https://lpnu.ua/integration
Академічна доброчесність: The policy regarding the academic integrity of the participants of the educational process is formed on the basis of compliance with the principles of academic integrity, taking into account the norms "Regulations on academic integrity at the Lviv Polytechnic National University" (approved by the academic council of the university on June 20, 2017, protocol No. 35).